Resistor-based Temperature Sensors In Cmos Tech... -

Utilizing the back-end-of-line (BEOL) metal layers provides a very stable, albeit lower, TCR, making them useful for specific high-stability requirements.

High-ohmic polysilicon resistors can be fabricated in a smaller footprint than the multi-transistor arrays required for high-accuracy BJT sensing. Resistor-based Temperature Sensors in CMOS Tech...

The fundamental principle involves measuring the voltage drop across these resistors when biased with a constant current or using them within a Wheatstone bridge configuration. Advantages over Traditional BJT Sensors different materials offer varying thermal responses:

High-poly and low-poly resistors are frequently used. While they offer good linearity, their TCR can be sensitive to process variations. Resistor-based Temperature Sensors in CMOS Tech...

At the heart of a resistor-based sensor is the Temperature Coefficient of Resistance (TCR). In CMOS processes, different materials offer varying thermal responses: