The work titled (Technology and Application of Micromechanical Silicon and Silicon-Glass Structures in Microsystems Technology) is a comprehensive monograph by Jan A. Dziuban , published by the Wrocław University of Science and Technology (Oficyna Wydawnicza Politechniki Wrocławskiej) in 2002 and 2004 .
The book provides a detailed look at the fabrication and utility of silicon-glass hybrid structures, which are critical for creating miniaturized sensors and actuators. Major topics include: J.Dziuban - Technologia i zastosowanie mikromec...
A central theme is the joining of different materials. It covers high-temperature fusion bonding and, most notably, anodic bonding (joining silicon to glass using heat and electric fields). J.Dziuban - Technologia i zastosowanie mikromec...